1 av 18 1 HENSIKT Procedure to make a make a controlled shut down of the instruments and supply systems, and to prepare the cleanroom for a power cut. 2 INNHOLD 5.1 Preparations before a power cut... 2 5.2 Controlled shut down of instruments... 3 5.2.1 EBL - S-4300... 3 5.2.2 S(T)EM S-5500... 6 5.2.2.1 For power cuts under 1 hour... 6 5.2.2.2 For power cuts longer than 1 hour... 6 5.2.3 FIB... 7 5.2.4 PECVD... 9 5.2.5 ICP-RIE (right one)... 12 5.2.6 ICP-RIE (left one)... 13 5.2.7 e-beam evaporator... 14 5.2.8 AJA sputter/evaporator... 14 5.2.9 Other instruments... 15 5.3 Controlled shut down of supply systems in K1-U020... 16 5.3.1 DIW system... 16 5.3.2 Vacuum cleaner... 16 5.3.3 Vacuum system... 17 5.3.4 Filter/dehydrator for CDA... 17 5.3.5 Process cooling water system... 18 3 ANSVAR/MYNDIGHET Permanent employees at NanoLab can perform this procedure. 4 SIKKERHETSTILTAK - 1/18
2 av 18 5 GJENNOMFØRING 5.1 Preparations before a power cut Notify users by email and the board. Allow at least 2 hours for preparations before the power is cut. For long lasting power cuts, remind users about samples in refrigerator/freezer. Notify cleaning personnel that the cleanroom will be closed. Agree on cleaning time after power cut. Shut down all instruments according to section 5.2. Seal the doors, marked in Figure 1, from the outside using tape. Figure 1 - Doors that should be sealed with tape. 2/18
3 av 18 5.2 Controlled shut down of instruments 5.2.1 EBL - S-4300 Instrumentansvarlig: Mark Chiappa Andre kontaktpersoner:, Ken Roger Ervik, Tron Arne Nilsen Kontaktperson hos leverandør: Torbjørn Sunde, Bruker AXS, +46 709 119662 Acronyms used: UPS Uninterruptible Power Supply ACDU AC Distribution Unit PSU Power Supply Unit IP Ion Pump IPPS Ion Pump Power Supply Evac Evacuation HV High Vacuum SC Specimen Chamber SEC Specimen Exchange Chamber MTP Molecular Turbo Pump Shutting down the tip 1. In the software on the right hand screen, ensure that Vacc is 0.0 (see Figure 2). If not, click on Vacc and select OFF in the pop up window. Vacc Figure 2 EBL software with Vacc turned on 2. In the software, start a gun shutdown procedure, which takes about 30 minutes. Tools -> Maintenance -> Shutdown -> Execute 3. Ensure that all HV power supply status LED s are green (see Figure 3). 4. Close all software and shut down the PCs and the screens. 3/18
4 av 18 Figure 3 - HV power supply in service finger 5 5. Switch off the Display power on the EVAC panel (see Figure 4). 6. Set the Obj aperture switch in the Off (middle) position and wait for 20 minutes. 7. Switch off the Evac power (on the EVAC panel, Figure 4). Figure 4 EVAC panel on the S-4300 8. Ensure ACDU power breaker OUTER BAKE is off (see Figure 5) 9. Ensure ACDU power breaker DISPLAY is off 10. Ensure ACDU power breaker EVAC is off 11. Ensure ACDU power breaker HV is off That s it. The only things that are still on now are the ion pumps. 4/18
5 av 18 ACDU power breakers IPPS ACDU mains breaker Figure 5 Power Supply Unit, placed in service finger 5 5/18
6 av 18 5.2.2 S(T)EM S-5500 Instrumentansvarlig: Andre kontaktpersoner: Vidar Fauske Kontaktperson hos leverandør: Torbjørn Sunde, Bruker AXS, +46 709 119662; Julia Netrval, Bruker AXS, +46 709 119673 5.2.2.1 For power cuts under 1 hour 1. Turn on the screens on the bottom button on the right hand side of the screens. 2. Home the stage in the PC-SEM software (left screen) by clicking Home in the upper right corner. A green stripe indicates that the stage is at home position. 3. Shut down the software and both PCs. 4. Shut down the Display, using the switch on the desk (see Figure 6). 5.2.2.2 For power cuts longer than 1 hour By switching off everything except the ion pumps, the UPS may be able to last for several days. 1. Turn on the screens on the bottom button on the right hand side of the screens. 2. Home the stage in the PC-SEM software (left screen) by clicking Home in the upper right corner. A green stripe indicates that the stage is at home position. 3. Shut down the software and both PCs. 4. Take the sample holder out to the entrance of the S.E.C (pre-pumping position) by: o Pull the sample holder out a couple of cm until it stops. Vacuum is holding it. o Twist the sample holder clockwise until it stops (~15 ). o o Let go of the sample holder, and take a new grip. Pull the sample holder out until it stops (approximately 20 cm). There will be a small edge after a couple of cm, but just let the holder twist slightly to pass it. Expect some resistance due to vacuum. o Twist the sample holder counter clockwise until it stops (~45 ). 5. Shut down the Display, using the switch on the desk (see Figure 6). 6. Turn off the EVAC Power switch on the EVAC panel (see Figure 6). If the instrument starts to beep and E10 is shown in the EVAC panel display, the sample holder is in the wrong position. 7. Wait until the countdown on the display is finished (display shows POFF). The shutdown process will take 30-40 minutes. 8. Switch off all power breakers, except IP, on the AC distribution unit in service finger 2 (see Figure 7). 9. That s it. Now everything except the ion pumps is switched off. EVAC panel Display power switch Figure 6 S(T)EM Figure 7 AC distribution unit for S(T)EM 6/18
7 av 18 5.2.3 FIB Instrumentansvarlig: Ken Roger Ervik Andre kontaktpersoner:, Bjørn Soleim, Bjørn Rune Rogne. Kontaktperson hos leverandør: support.nordic@fei.com The UPS only lasts up to 8 hours. For longer power cuts, call the instrument responsible. 1. Make sure the system is under vacuum. The entire icon on the lower right side of the right hand screen should be green and not grey (see Figur 8). Figur 8 FIB system vacuum icon is grey bad vacuum 2. Switch off the PC to the left. 3. If the mouse cannot be seen on the right hand screen now, press + or on the small box between the screens (Serveview Pro). 4. On the right hand screen, go to the Beam Control tab in the software (see Figure 9). Beam Control tab xt microscope Server bar Figure 9 FIB software, Beam Control and xt User Interface 5. Click Sleep if possible, to turn off ion source and HT (see Figure 10). 7/18
8 av 18 Figure 10 Beam control tab. Sleep has not been clicked. 6. On the xt microscope Server bar (see Figure 9), click STOP UI to stop the xt microscope user interface (see Figure 11). 7. Double click the blue field on the xt microscope Server bar (see Figure 11). Figure 11 xt microscope Server bar 8. Click Stop to stop the microscope server. Wait until Server state shows Stopped, then click Standby on the xt Microscope Server dialog box (see Figure 12). Figure 12 xt Microcsope server dialog box 9. Ensure that the lamp on the front of the instrument is orange. If it is still green, the FIB is not in Standby mode. Try again or call the instrument responsible. 10. Turn off the right hand side PC. 11. Turn off the box between the screens, marked Serveview Pro. 8/18
9 av 18 5.2.4 PECVD Instrumentansvarlig: Espen Rogstad Andre kontaktpersoner: Øystein Dahl, Tron Arne Nilsen, Renato Bugge, Mark Chiappa Kontaktperson hos leverandør: Mathias Mathiszik, Oxford Instruments, +49 160 8872 056, +49 6135 7057 00 Username and password: OPT 1. Make sure the instrument is not in use by clicking on Process and choosing Chamber 1 in the drop down menu. The Chamber 1 screen looks like in Figure 13. All gases (1-9) should show value 0.0. Figure 13 Chamber 1 2. The field on the top of the screen, to the left of the field CHAMBER 1, should say Manager. If it says View_Only, click on the field and log in. Username and password: OPT 3. Click the System button in the top left corner and choose Pump control. 4. Vent the load lock by clicking the Stop and then the Vent button in the left hand box (see Figure 14). This takes 2-3 minutes. 5. Vent the process chamber by clicking the Stop and then the Vent button in the right hand box (see Figure 14). This takes about 15 minutes. 9/18
10 av 18 Load lock Process chamber Figure 14 Pump control screen 6. Wait until the venting is finished in both load lock and chamber, by looking at the text messages in the boxes. If it after 20 minutes does not say that venting is finished: o Click Evacuate o If evacuation starts within a minute, press Stop and then Vent. Wait until the timer has reached 0 and then go to the next point. If evacuation does not start, call instrument responsible. o Check the turbo pump display in the service finger (see Figure 15). When it has reached 0 Hz, proceed to point 7. 7. Turn off the PC. 8. Turn off the PECVD power switch on the instrument, in the service finger. 9. Turn off the two PSU systems in the service finger, using the main switches (see Figure 16). 10. Turn off the circuit breaker on the PSU system. Figure 15 Turbo pump display for PECVD and RIE 10/18
11 av 18 Main switches Circuit breaker Figure 16 Power Supply Units (PSU) for PECVD heater 11/18
12 av 18 5.2.5 ICP-RIE (right one) Instrumentansvarlig: Espen Rogstad Andre kontaktpersoner: Øystein Dahl, Tron Arne Nilsen, Renato Bugge, Mark Chiappa Kontaktperson hos leverandør: Mathias Mathiszik, Oxford Instruments, +49 160 8872 056, +49 6135 7057 00 Username and password: OPT 1. Follow steps 1-5 for PECVD shut down. 2. Wait until the venting is finished in both load lock and chamber, by looking at the text messages in the boxes. If it after 20 minutes does not say that venting is finished: o o o Click Evacuate If evacuation starts within a minute, press Stop and then Vent. Wait until the timer has reached 0 and then go to the next point. If evacuation does not start, call instrument responsible. Check the turbo pump display in the service finger (see Figure 17). When it has reached 0 rpm, proceed to point 3. 3. Turn off the PC. 4. Turn off the ICP-RIE power switch on the instrument, in the service finger. Figure 17 Turbo pump display for ICP-RIE 12/18
13 av 18 5.2.6 ICP-RIE (left one) Instrumentansvarlig: Espen Rogstad Andre kontaktpersoner: Øystein Dahl, Tron Arne Nilsen, Renato Bugge, Mark Chiappa Kontaktperson hos leverandør: Mathias Mathiszik, Oxford Instruments, +49 160 8872 056, +49 6135 7057 00 Username and password: OPT 1. Follow steps 1-7 for PECVD shut down. 2. Turn off the chiller in the service finger (see Figure 18), if it is not already turned off. 3. Turn off the RIE power switch on the instrument, in the service finger. Figure 18 RIE chiller 13/18
14 av 18 5.2.7 e-beam evaporator 1. Make sure no process is running. 2. Switch off the pumping station via the Ф buttons on the DCU:s (see Figure 19). 3. Turn off the main switch (see Figure 20). Figure 20 - Main switch in service finger 5 Figure 19 DCU power buttons 5.2.8 AJA sputter/evaporator 1. Check that no process is running. 2. Turn off the turbo pumps for the main chamber and the load lock. 3. When the rotation speed is 0 Hz (seen in the top right corner of each panel), turn off the main switch on the top right side of the panel. Figure 21 AJA panels 14/18
15 av 18 5.2.9 Other instruments Turn off the instruments that are usually turned on throughout the week: Nanoimprinter Shut down PC. Turn key to Off position. Turn off the power switch on the power supply unit under the instrument, and then on again (see Figure 22). After 10 minutes, turn the power switch off again. Turn off Main switch on the instrument. Turn off the pump in the service finger. Figure 22 - Nanoimprinter PSU, with Power switch down to the right Maskaligner MA6 Follow the short user guide to turn off. Maskaligner MJB3 Turn off the lamp intensity controller, MJB3-electronics, CDA valve and vacuum valve. Set the timer on 30 minutes to turn off the nitrogen. As for maskaligner MA56, but the MJB3 electronics switch is placed as seen in Figure 23 (Switch down = electronics turned off). MJB3-electronics Figure 23 - Maskaligner MJB3 Glove boxes Switch off both glove boxes, using the main switch on the control units. Fumehoods Check that hotplates and all other electronics are turned off. Press the emergency button and make sure all fumehoods are closed. For HF and PDMS benches, just check that hotplate and spinner are turned off. Make sure all computers and small instruments are shut down. 15/18
16 av 18 5.3 Controlled shut down of supply systems in K1-U020 The following steps could be done, but is not necessary before a power cut. The systems can handle being turned off by the power cut. 5.3.1 DIW system No action needed 5.3.2 Vacuum cleaner Turn Start switch to 0 (see Figure 25). Turn Huvudbrytare to 0. Figure 24 DIW system panel Figure 25 Vacuum cleaner 16/18
17 av 18 5.3.3 Vacuum system Turn switch ANLEGG to AV (see Figure 26) 5.3.4 Filter/dehydrator for CDA Turn off the power switch (see Figure 27) Figure 26 Vacuum system Figure 27 Filter for CDA 17/18
18 av 18 5.3.5 Process cooling water system Do not do anything. Figure 28 Process cooling water system 6 REFERANSER 18/18