(12) Translation of european patent specification

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1 (12) Translation of european patent specification (11) NO/EP B1 (19) NO NORWAY (1) Int Cl. C01B 33/7 ( ) B01J 21/06 ( ) B01J 23/26 ( ) B01J 23/28 ( ) B01J 23/34 ( ) B01J 23/0 ( ) B01J 23/72 ( ) B01J 23/7 ( ) B01J 3/ ( ) B01J 37/02 ( ) C01B 33/08 ( ) Norwegian Industrial Property Office (21) Translation Published (80) Date of The European Patent Office Publication of the Granted Patent (86) European Application Nr (86) European Filing Date (87) The European Application s Publication Date (30) Priority , US, P (84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR (73) Proprietor MEMC Electronic Materials, Inc., 01 Pearl Drive, St. Peters, MO 63376, US-USA (72) Inventor REVANKAR, Vithal, 2422 La Rochelle Court, SeabrookTexas 7786, US-USA IBRAHIM, Jameel, Cruster Oaks Drive, HumbleTexas 77346, US-USA (74) Agent or Attorney Zacco Norway AS, Postboks 2003 Vika, 012 OSLO, Norge (4) Title Fremgangsmåte for rensing av silisiumtetrafluorid (6) References Cited: DE-A US-A US-A US-A US-A US-A CHIN-CHENG CHIEN, JING-ZHEN SHI, TA-JEN HUANG: "Effect of Oxygen Vacancy on CO- NO-O2 Reaction over Yttria-Stabilized Zirconia-Supported Copper Oxide Catalyst" INDUSTRIAL & ENGINEERING CHEMISTRY RESEARCH, vol. 36, 1997, pages , XP

2 Enclosed is a translation of the patent claims in Norwegian. Please note that as per the Norwegian Patents Acts, section 66i the patent will receive protection in Norway only as far as there is agreement between the translation and the language of the application/patent granted at the EPO. In matters concerning the validity of the patent, language of the application/patent granted at the EPO will be used as the basis for the decision. The patent documents published by the EPO are available through Espacenet (http://worldwide.espacenet.com) or via the search engine on our website here: https://search.patentstyret.no/ NO/EP

3 1 Patentkrav 1. Fremgangsmåte for å fremstille en renset silisiumtetrafluoridgass, der fremgangsmåten omfatter: å bringe en silisiumtetrafluoridkildegass omfattende silisiumtetrafluorid og karbonmonoksid i kontakt med en katalysator omfattende et inert substrat og et katalytisk metalloksid på overflaten, inkludert overflaten til mikroporene derav, der det katalytiske metalloksidet omfatter et katalytisk metall valgt fra gruppen bestående av kobber, mangan og blandinger derav, der katalysatoren omfatter mindre enn 3 vekt-% katalytisk metall; og 1 å adsorbere minst en del av karbonmonoksidet på overflaten til katalysatoren ved å reagere karbonmonoksidet med det katalytiske metalloksidet for å danne én eller flere metallkarbonylkomplekser og derved frembringe en strøm av renset silisiumtetrafluoridgass som har en redusert konsentrasjon av karbonmonoksid i forhold til kildegassen, hvori minst 97 % av karbonmonoksidet i silikontetrafluoridkildegassen fjernes Fremgangsmåte som angitt i krav 1, hvori det inerte substratet er valgt fra gruppen bestående av zirconiumoksid, aluminasilikat, silisiumoksid, aluminiumoksid, yttriumoksid og blandinger derav Fremgangsmåte som angitt i krav 1 eller 2, hvori det inerte substratet omfatter en metalloksidstabilisator omfattende et metall valgt fra gruppen bestående av lantanider, aktinider, magnesium, yttrium, kalsium og blandinger derav Fremgangsmåte som angitt i krav 3, hvori det inerte substratet omfatter mindre enn 0,1 vekt-% stabilisator.. Fremgangsmåte som angitt i et hvilket som helst av kravene 1-4, hvori det inerte substratet omfatter yttriumoksid som stabilisator.

4 2 6. Fremgangsmåte som angitt i et hvilket som helst av kravene 1-, hvori silisiumtetrafluoridkildegassen omfatter fra 0,001 til 3,0 volum-% karbonmonoksid og bringes i kontakt med katalysatoren ved en temperatur fra 30 C til 90 C. 7.. Fremgangsmåte som angitt i et hvilket som helst av kravene 1-6, hvori katalysatoren omfatter fra 0,001 til 1,0 vekt-% katalytisk metall og 9 til 99,999 vekt-% inert substrat. 8. Fremgangsmåte som angitt i et hvilket som helst av kravene 1-7, hvori: katalysatoren har et overflateareal fra 1 m 2 /g til 00 m 2 /g; katalysatoren har en bulkporøsitet fra 30 % til 80 %; og katalysatoren har en mikroporøsitet fra 1 % til 20 % Fremgangsmåte som angitt i et hvilket som helst av kravene 1-8, hvori minst 99 % av karbonmoniksidet i silisiumtetrafluoridkildegassen fjernes Fremgangsmåte som angitt i et hvilket som helst av kravene 1-9, hvori silisiumtetrafluoridkildegassen omfatter sure forbindelser valgt fra gruppen bestående av hydrogenfluorid, hydroklorsyre, svoveldioksid, svoveltrioksid, hydrogensulfid og blandinger derav, og hvori silisiumtetrafluoridkildegassen bringes i kontakt med en ionebytteharpiks før silisiumtetrafluoridkildegassen bringes i kontakt med katalysatoren for å frembringe en strøm av renset silisiumtetrafluoridgass som har en redusert konsentrasjon av sure forbindelser. 11. Fremgangsmåte som angitt i et hvilket som helst av kravene 1-, hvori silisiumtetrafluoridkildegassen omfatter inerte forbindelser, og hvori: silisiumtetrafluoridkildegassen avkjøles til en kryogen temperatur; og 30 den avkjølte silisiumtetrafluoridkildegassen mates til en distillasjonskolonne etter at silisiumtetrafluoridkildegassen er brakt i kontakt med katalysatoren for å frembringe en strøm av renset silisiumtetrafluoridgass som har en redusert konsentrasjon av inerte forbindelser.

5 3 12. Fremgangsmåte som angitt i et hvilket som helst av kravene 1-11, hvori silisiumtetrafluoridkildegassen omfatter karbondioksid og en del av karbondioksidet fjernes ved å bringe silisiumtetrafluoridgassen i kontakt med en absorbsjonsvæske omfattende minst én glykoldieter. 13. A process as set forth in any one of claims 1-12 wherein the catalyst is heated to 00 C to 70 C to decompose the metal carbonyl complexes and cause carbon oxides to release from the catalyst to regenerate the catalyst. Fremgangsmåte som angitt i et hvilket som helst av kravene 1-12, hvori katalysatoren varmes til 00 C til 70 C for å spalte metallkarbonylkomplekset og bevirke at karbonoksider frigjøres fra katalysatoren for å regenerere katalysatoren.

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